Check the method of measurement of small mechanical vibrations

DOI №______

Abstract

In proposed article we present the results of an experimental measurement of small mechanical vibrations using a capacitive sensor. Oscillations of a hemispherical metal resonator were measured. The calculated formulas connecting the amplitude of the mechanical oscillations of the resonator and the magnitude of the signal of a capacitive sensor are obtained. The block diagram of the equipment is described. The experimental oscillograms of the measured sensor signals, amplitudes of the measured signals, reduced to the input of the equipment amplifiers are given. Experimental wave form of measured sensor signals, the amplitudes of the electric measured signals given to the input apparatus amplifiers. The magnitudes of the electrical read out signals from a capacitive sensor were measured. The amplitude of the mechanical oscillations of the resonator is calculated. The dependence of amplitude of metal resonator mechanical oscillations of the excitation duration was obtained. An investigation was made of reading the signals in the channels during the rotation of the metal resonator. The results of the calculation of mechanical oscillations of a metal resonator during its rotation with different angular rate are obtained.
The measurements and calculation results showed that using the described technique it is possible to detect and measure mechanical oscillations of a metal resonator in the range of 33 nm. The method of measuring small mechanical oscillations of a metal resonator and the obtained numerical data can be used in the design and calculation of the parameters of various devices with capacitive sensors.

Keywords: capacitive sensor; metal resonator; small mechanical displacements; calculation of the amplitude of oscillations of the resonator.

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